JPH0226936Y2 - - Google Patents
Info
- Publication number
- JPH0226936Y2 JPH0226936Y2 JP8663884U JP8663884U JPH0226936Y2 JP H0226936 Y2 JPH0226936 Y2 JP H0226936Y2 JP 8663884 U JP8663884 U JP 8663884U JP 8663884 U JP8663884 U JP 8663884U JP H0226936 Y2 JPH0226936 Y2 JP H0226936Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- ring
- holder
- hole
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 41
- 238000012545 processing Methods 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8663884U JPS612451U (ja) | 1984-06-13 | 1984-06-13 | 基板ホルダ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8663884U JPS612451U (ja) | 1984-06-13 | 1984-06-13 | 基板ホルダ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS612451U JPS612451U (ja) | 1986-01-09 |
| JPH0226936Y2 true JPH0226936Y2 (en]) | 1990-07-20 |
Family
ID=30638131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8663884U Granted JPS612451U (ja) | 1984-06-13 | 1984-06-13 | 基板ホルダ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS612451U (en]) |
-
1984
- 1984-06-13 JP JP8663884U patent/JPS612451U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS612451U (ja) | 1986-01-09 |
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